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ZY-1110大弧離子鍍膜機(jī)

　　工具鍍/Tool Coating 標(biāo)準(zhǔn)機(jī)型/Standard Model ZY-1110大弧鍍膜機(jī)

　　Big Arc Ion Coating Machine

　　設(shè)備簡(jiǎn)述/Equipment Brief

　　ZY-1110大弧離子鍍膜機(jī)是我公司自主研發(fā)的超硬膜離子鍍膜機(jī)，采用獨(dú)有的新型過濾弧源鍍膜技術(shù)、等離子體增強(qiáng)陽(yáng)極輔助鍍膜技術(shù)，規(guī)劃了爐體內(nèi)等離子體的路線和分布，增強(qiáng)了刻蝕效果，提高了離化率，使得靶材表面被均勻刻蝕，涂層表面更光滑致密，提升了涂層的結(jié)合力，確保了涂層厚度及涂層的均勻性。同時(shí)，新技術(shù)的應(yīng)用提高了鍍膜效率，節(jié)約了能耗和運(yùn)行成本。

　　ZY-1110 Big Arc ion vacuum coating machine is a super hard film ion coating machine, self-developed by IKS, adopted unique new filter arc source coating technology, plasma enhanced and anode assisted coating technology, the route and distribution of plasma inside of the furnace are planned, the ionization rate of the target material was enhanced, So that the surface of the target is etched uniformly, the coating surface is smooth and compact while the bonding force of the coating is optimized, ensure coating thickness and uniformity. Meanwhile, the application of new technology improves the efficiency of coating, saves energy and operation cost.

設(shè)備參數(shù)/Equipment Parameters

爐體尺寸Chamber Size	Ф1180XH1050	有效空間Effective Space	Ф800XH650
應(yīng)用技術(shù)Applied Technology	IET+ BIG ARC	靶材數(shù)量Quantity of Target Material	IET2+ARC9 xφ160
標(biāo)準(zhǔn)涂層Standard Coating	TiN, CrN, AlCrN, etc.	其他復(fù)合涂層Other Composite Coating	TiAlCrN, TiSiN,TiAlCN,etc.
生產(chǎn)周期Production Cycle	4-6小時(shí)/爐4-6hours/furnace	外圍尺寸Overall Dimension	L5800XW2100XH2100mm L4800XW3000XH2100
使用范圍Rang of Application	適用于滾刀，鉆頭，棒狀銑刀，微鉆，刀粒等。Hobs，drills，stick milling cutter, micro-drill, cutter grain, etc

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